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Yukisige Saitoh
Yukisige Saitoh
Electronic engineering
Silicon on insulator
Insulator (electricity)
MOSFET
Silicon
3
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ELFIN (ELevated Field INsulator) and SEP (S/D Elevated by Poly-Si Plugging) Process for Ultra-Thin SOI MOSFETs
2002
SDM | SIAM International Conference on Data Mining
Jong-Wook Lee
Yukisige Saitoh
Risho Koh
Shigeharu Yamagami
Hitoshi Wakabayashi
Tohru Mogami
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ELFIN (elevated field insulator) and SEP (S/D elevated by poly-Si plugging) process for ultra-thin SOI MOSFETs with high performance and high reliability
2002
VLSIT | Symposium on VLSI Technology
Jong-wook Lee
Hisashi Takemura
Yukisige Saitoh
Risho Koh
Shigeharu Yamagami
Tohru Mogami
M. Uto
N. Ikezawa
N. Takasu
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Elevated field insulator (ELFIN) process for device isolation of ultrathin SOI MOSFETs with top silicon film less than 20 nm
2002
IEEE Electron Device Letters
Jong-Wook Lee
Yukisige Saitoh
Risho Koh
Tohru Mogami
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