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I. C. Edmond Turcu
I. C. Edmond Turcu
Laser
Optics
Materials science
Collimated light
Lithography
3
Papers
5
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Advances in CPL, collimated plasma source, and full-field exposure for sub-100-nm lithography
2003
Brent E. Boerger
Scott McLeod
Richard Forber
I. C. Edmond Turcu
Celestino J. Gaeta
Donald K. Bailey
Jacob Ben-Jacob
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X-ray Spectral Measurements of the JMAR High-Power Laser-plasmaSource
2002
R. R. Whitlock
Charles M. Dozier
Daniel A. Newman
I. C. Edmond Turcu
Celestino J. Gaeta
Kelly L. Cassidy
Michael F. Powers
Thomas Kleindolph
James H. Morris
Richard Forber
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Microfocus soft x-ray source generated by a compact high-power laser plasma
2000
I. C. Edmond Turcu
Harry Rieger
Yuli Vladimirsky
Robert K. Grygier
Michael F. Powers
Joe R. Naunguyan
S. M. Campeau
G. French
Richard Alan Forber
Richard M. Foster
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Citations (2)
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