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Kazuyoshi Tsukamoto
Kazuyoshi Tsukamoto
Panasonic
Materials science
Dielectric
Electronic engineering
Electromigration
Time-dependent gate oxide breakdown
3
Papers
4
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Direct CMP process with advanced ELK for 45 nm half pitch interconnects
2010
IITC | International Interconnect Technology Conference
T. Seo
Yoshihiro Oka
Kohei Seo
Kinya Goto
Hiroyuki Chibahara
Hayato Korogi
S. Suzuki
M. Hamada
Naohito Suzumura
Kazuyoshi Tsukamoto
Akira Ueki
Takahisa Furuhashi
D. Kodama
Shigenori Kido
Junko Izumitani
Kazuo Tomita
Etsuyoshi Kobori
A. Ikeda
Y. Kawano
T. Ueda
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New multi-step UV curing process for porogen-based porous SiOC
2009
IITC | International Interconnect Technology Conference
Kohei Seo
Yoshihiro Oka
Kotaro Nomura
Makoto Tsutsue
Etsuyoshi Kobori
Kinya Goto
Yumiko Mizukami
Toshihiro Ohtsuka
Kazuyoshi Tsukamoto
Susumu Matsumoto
Tetsuya Ueda
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Interface engineering for highly-reliable 65 nm-node Cu/ULK (k=2.6) interconnect integration
2005
IITC | International Interconnect Technology Conference
A. Ishii
Susumu Matsumoto
T. Hattori
S. Suzuki
S. Isono
Akihisa Iwasaki
Kazuo Tomita
K. Hashimoto
S. Tawa
Takeshi Furusawa
D. Kodama
S. Ogawa
S. Suzumura
Makoto Tsutsue
Kinya Goto
K. Kobayashi
H. Ohshita
M. Hamada
N. Amoh
H. Okamura
Kazumasa Yonekura
T. Hamatani
T. Kobayshi
Kazuyoshi Tsukamoto
Masazumi Matsuura
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Citations (1)
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