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Minami Yuto
Minami Yuto
Analytical chemistry
Thermal
Plasma processing
Sputtering
Materials science
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2
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Thermal Reactive Ion Etching of Minor Metals with SF6 Plasma
2017
Sensors and Materials
Han Gang
Murata Yuki
Minami Yuto
Sohgawa Masayuki
Abe Takashi
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