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Ken Nakao
Ken Nakao
Materials science
Heating element
Isothermal process
Rapid thermal processing
Electronic engineering
3
Papers
2
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Rapid isothermal batch processing
2002
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Anthony Dip
R. Soave
Sanjeev Kaushal
Ken Nakao
S. Sasaki
T. Tsuda
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Multi-wafer rapid isothermal processing
2001
ISSM | International Symposium on Semiconductor Manufacturing
Ken Nakao
Takanobu Asano
Hideo Fukushima
H Yamamoto
Anthony Dip
Raymond Joe
David L. O'Meara
R. Soave
Sanjeev Kaushal
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Heater provided with a carbon wire heating element enclosed in a quartz glass tube
1999
Eiichi Toya
Tomio Konn
Tomohiro Nagata
Norihiko Saito
Shigeru Yamamura
Ken Nakao
Takanori Saito
Hisaei Osanai
Toshiyuki Makiya
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