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Wan Soo Song
Wan Soo Song
Deposition (law)
Dry etching
Materials science
Hydrogen
Composite material
1
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3
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Surface Analysis of Amorphous Carbon Thin Film for Etch Hard Mask.
2021
Journal of Nanoscience and Nanotechnology
Kwang Pyo Kim
Wan Soo Song
Min-Kyu Park
Sang Jeen Hong
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