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Minoru Shionoya
Minoru Shionoya
Atomic physics
Tungsten
Reactive-ion etching
Focused ion beam
Silicon on insulator
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Structure Analysis of Tungsten Contact Failure in Silicon on Insulator Device
2002
Shinku
Takemi Ueki
Shinji Nakamura
Minoru Shionoya
Shigeru Nakajima
Naohisa Inoue
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