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Henry Birner
Henry Birner
Laser power scaling
Laser
Extreme ultraviolet
Electric discharge in gases
Radiation
4
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48
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Moore’s law und die Auswirkungen auf Lithografie
2006
Henry Birner
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High-power sources for EUV lithography: state of the art
2004
Uwe Stamm
Juergen Kleinschmidt
Kai Gaebel
Henry Birner
Imtiaz Ahmad
Denis Bolshukhin
Jesko Brudermann
Tran Duc Chinh
Frank Flohrer
Sven Goetze
Guido Hergenhan
Diethard Kloepfel
Vladimir Dr. Korobochko
Bjoern Mader
Rainer Mueller
Jens Ringling
Guido Schriever
Christian Ziener
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Citations (6)
EUV source power and lifetime: the most critical issues for EUV lithography
2004
Uwe Stamm
Juergen Kleinschmidt
Kai Gaebel
Henry Birner
Imtiaz Ahmad
Denis Bolshukhin
Jesko Brudermann
Tran Duc Chinh
Frank Flohrer
Sven Goetze
Guido Hergenhan
Diethard Kloepfel
Vladimir Korobotchko
Björn Mader
Rainer Mueller
Jens Ringling
Guido Schriever
Christian Ziener
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Citations (10)
High-power EUV lithography sources based on gas discharges and laser-produced plasmas
2003
Uwe Stamm
Imtiaz Ahmad
István Balogh
Henry Birner
Denis Bolshukhin
Jesko Brudermann
S. Enke
Frank Flohrer
Kai Dr. Gäbel
Sven Götze
Guido Hergenhan
Jürgen Dr. Kleinschmidt
Diethard Klöpfel
Vladimir Korobotchko
Jens Ringling
Guido Schriever
Chinh Duc Tran
C. Ziener
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Citations (32)
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