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Linda M. Hadel
Linda M. Hadel
IBM
Optics
Lithography
Real-time computing
Metrology
Chip
2
Papers
4
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193 lithography and RELACS processing for BEOL lithography
2001
Ronald A. DellaGuardia
Karen Petrillo
Jia Chen
Paul A. Rabidoux
Timothy J. Dalton
Steven J. Holmes
Linda M. Hadel
Kelly Malone
Arpan P. Mahorowala
Stephen E. Greco
Richard A. Ferguson
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Process window metrology
2000
Christopher P. Ausschnitt
William Chu
Linda M. Hadel
Hok Ho
Peter Talvi
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Citations (3)
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