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Manuel Bärtschi
Manuel Bärtschi
Optoelectronics
Cavity magnetron
Plasma
Materials science
Power (physics)
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Investigation of the influence of plasma source power on the properties of magnetron sputtered Ta2O5 thin films
2021
Epj Web of Conferences
Manuel Bärtschi
Daniel Schachtler
Silvia Schwyn Thöny
Thomas Südmeyer
Roelene Botha
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