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Youhei Endo
Youhei Endo
Chemical vapor deposition
Metallurgy
Cobalt
Electroplating
Sputtering
2
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10
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Performance of Integrated Cu Gap-Filling Process with Chemical Vapor Deposition Cobalt Liner (Special Issue : Advanced Metallization for ULSI Applications)
2013
Japanese journal of applied physics : JJAP
Yutaka Kokaze
Shuji Kodaira
Youhei Endo
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Performance of Integrated Cu Gap-Filling Process with Chemical Vapor Deposition Cobalt Liner
2013
Japanese Journal of Applied Physics
Yutaka Kokaze
Shuji Kodaira
Youhei Endo
Junichi Hamaguchi
Masamichi Harada
Shouichirou Kumamoto
Yuta Sakamoto
Yasushi Higuchi
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Citations (10)
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