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S.F. Vogt
S.F. Vogt
IBM
Dielectric
Materials science
Electronic engineering
Strain energy release rate
Chemical vapor deposition
2
Papers
14
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Channel cracking in low-k films on patterned multi-layers
2004
IITC | International Interconnect Technology Conference
X-H Liu
Thomas M. Shaw
Michael Lane
Robert Rosenberg
S. Lane
J.P. Doyle
Darryl D. Restaino
S.F. Vogt
D.C. Edelstaeing
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Citations (6)
Optimization of SiCOH dielectrics for integration in a 90nm CMOS technology
2004
IITC | International Interconnect Technology Conference
Alfred Grill
Daniel C. Edelstein
Darryl D. Restaino
Michael Lane
Stephen M. Gates
E. Liniger
Timothy M. Shaw
X-H Liu
David P. Klaus
Vishnubhai Vitthalbhai Patel
S. Cohen
Eva E. Simonyi
N. Klymko
S. Lane
K. Ida
S.F. Vogt
T. Van Kleeck
Charles R. Davis
M. Ono
Takeshi Nogami
Thomas H. Ivers
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Citations (8)
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