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Fred M. Niell
Fred M. Niell
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Xenon
Extreme ultraviolet
Engineering design process
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Development of a high-pulse-rate EUV source
2009
Proceedings of SPIE
Stephen F. Horne
Fred M. Niell
Matthew J. Partlow
Matthew M. Besen
Donald K. Smith
Paul A. Blackborow
Deborah Gustafson
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