Old Web
English
Sign In
Acemap
>
authorDetail
>
L. V. Aswege
L. V. Aswege
Environmental chemistry
Sulfuric acid
Photoresist
Wafer
Contamination
1
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Advanced photo resist removal using O3 and moist UPW in semiconductor production
2004
G. Philit
L. V. Aswege
Y. Victouron
M. Madore
K. Wolke
M. C. Clech
E. Asselin-Degrunge
A. Chabli
D. Louis
Show All
Source
Cite
Save
Citations (1)
1