Old Web
English
Sign In
Acemap
>
authorDetail
>
Yoshio Susa
Yoshio Susa
Plasma
Analytical chemistry
Chemistry
Radial line
Slot antenna
3
Papers
3
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Characterization of CO2 plasma ashing for less low-dielectric-constant film damage
2015
Journal of Vacuum Science and Technology
Yoshio Susa
Hiroto Ohtake
Zhao Jianping
Lee Chen
Toshihisa Nozawa
Show All
Source
Cite
Save
Citations (3)
Measurements and modeling of the impact of weak magnetic fields on the plasma properties of a planar slot antenna driven plasma source
2015
Journal of Vacuum Science and Technology
Jun Yoshikawa
Yoshio Susa
Peter L. G. Ventzek
Show All
Source
Cite
Save
Citations (0)
Electrical and optical diagnostics of CO2 microwave plasmas produced by a radial-line slot antenna
2012
Bulletin of the American Physical Society
Se Youn Moon
Demetre J. Economou
Vincent M. Donnelly
Jianping Zhao
Lee Chen
Radha Sundararajan
Yoshio Susa
Toshihisa Nozawa
Show All
Source
Cite
Save
Citations (0)
1