Old Web
English
Sign In
Acemap
>
authorDetail
>
Kenichi Miyao
Kenichi Miyao
Magnetic field
Optics
Extreme ultraviolet lithography
Physics
Laser
2
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Update of development progress of the high power LPP EUV light source using a magnetic field
2020
Gouta Niimi
Shinji Nagai
Tsukasa Hori
Yoshifumi Ueno
Tatsuya Yanagida
Kenichi Miyao
Hideyuki. Hayashi
Yukio Watanabe
Tamotsu Abe
Hiroaki Nakarai
Takashi Saito
Hakaru Mizoguchi
Show All
Source
Cite
Save
Citations (0)
Update of the development progress of the high power LPP-EUV light source using a magnetic field
2019
Yuta Takashima
Yoshifumi Ueno
Takayuki Yabu
Tsukasa Hori
Georg Soumagne
Shinji Nagai
Tatsuya Yanagida
Yutaka Shiraishi
Kenichi Miyao
Hideyuki. Hayashi
Yukio Watanabe
Tamotsu Abe
Hiroaki Nakarai
Takashi Saito
Hakaru Mizoguchi
Show All
Source
Cite
Save
Citations (0)
1