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Shima Kohei
Shima Kohei
Materials science
Interconnection
Cladding (metalworking)
Electronic engineering
Optoelectronics
3
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1
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Agライニングオートクレーブにおける酸性NH 4 F鉱化剤を用いた2インチ長GaN単結晶のアンモニア熱成長
2020
Applied Physics Express
Tomida Daisuke
Bao Quanxi
Saito Makoto
Osanai Ryu
Shima Kohei
Kojima Kazunobu
Ishiguro Tohru
F Chichibu Shigefusa
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Sub-nanoscale Structure and Barrier Performance of CVD-Cu(Mn)/ALD-Co(W) Interconnect System Proved Using 3D Atom Probe
2015
Shima Kohei
Tu Yuan
Han Bin
Takamizawa Hisashi
Shimizu Hideharu
Shimizu Yasuo
Momose Takeshi
Inoue Koji
Nagai Yasuyoshi
Shimogaki Yukihiro
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Single-layered barrier/liner Co(W) by ALD/CVD for next generation ULSI-Cu interconnect
2012
Technical report of IEICE. SDM
Shimizu Hideharu
Shima Kohei
Momose Takeshi
Kobayashi Yoshihiko
Shimogaki Yukihiro
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