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Kawasuji Yasufumi
Kawasuji Yasufumi
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新しい高出力HVM LPP‐EUV光源の性能
2016
Mizoguchi Hakaru
Nakarai Hiroaki
Abe Tamotsu
Nowak Krzysztof M
Kawasuji Yasufumi
Tanaka Hiroshi
Watanabe Yukio
Hori Tsukasa
Kodama Takeshi
Shiraishi Yutaka
Yanagida Tatsuya
Yamada Tsuyoshi
Yamazaki Taku
Okazaki Shinji
Saitou Takashi
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HVMリソグラフィーのための250W EUV光源の開発【Powered by NICT】
2016
Mizoguchi Hakaru
Nakarai Hiroaki
Abe Tamotsu
Nowak Krzysztof M
Kawasuji Yasufumi
Tanaka Hiroshi
Watanabe Yukio
Hori Tsukasa
Kodama Takeshi
Shiraishi Yutaka
Yanagida Tatsuya
Yamada Tsuyoshi
Yamazaki Taku
Okazaki Shinji
Saitou Takashi
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最新報告32/22nm以降の先端リソグラフィ ギガフォトンの露光装置用ArFレーザ光源 TGM技術およびOPS・LNMの改良でCD変動を低減 液浸ダブルパターニングで量産32nmノード対応へ
2009
Wakana Katsuhiko
Tsushima Hiroaki
Matsumoto Shin-ichi
Yoshino Masaya
Kumasaki Takahito
Watanabe Hidenori
Ota Takeshi
Tanaka Satoshi
Suzuki Tooru
Nakai Hiroaki
Kawasuji Yasufumi
Kurosu Akihiko
Matsunaga Takashi
Fujimoto Junichi
Mizoguchi Hakaru
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