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R Coquand
R Coquand
STMicroelectronics
Metal gate
Energy-dispersive X-ray spectroscopy
Transistor
Architecture
Nanowire
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Defect analysis of a silicon nanowire transistor by X-ray energy dispersive spectroscopy technique in a STEM: 2D mappings and tomography
2013
K Lepinay
F. Lorut
A. Pofelski
R Coquand
R. Pantel
Thierry Epicier
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