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Chien-Cheng Chen
Chien-Cheng Chen
TSMC
Optics
Physics
Electron-beam lithography
Monte Carlo method
Lithography
4
Papers
1
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Mask lithographic performance investigation with computational Monte-Carlo method on advanced mask patterning
2018
Chun-Hung Liu
Chia-Hua Chang
Wen Lo
Shih-Ming Chang
Hsin-Wei Wu
Chien-Cheng Chen
Alex Chen
Shuo-Yen Chou
Ru-Gun Liu
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Characterization of charging-induced pattern positioning errors in advanced mask making
2016
Journal of Micro-nanolithography Mems and Moems
Chien-Cheng Chen
Yen-Cheng Ho
Shao-Wen Chang
Chia-Jen Chen
Ta-Cheng Lien
Chih-Cheng Lin
Hsin-Chang Lee
Anthony Yen
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Investigation and modeling of CPL mask profiles using OCD
2016
Hsuan-Chen Chen
Ren-Hao Lin
Chien-Cheng Chen
Cheng-Hsuan Huang
Ta-Cheng Lien
Chia-Jen Chen
Gaston Lee
Hsin-Chang Lee
Anthony Yen
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Exploring the origin of charging-induced pattern positioning errors in mask making using e-beam lithography
2015
Chien-Cheng Chen
Tzu-Ling Liu
Shao-Wen Chang
Yen-Cheng Ho
Chia-Jen Chen
Chih-Cheng Lin
Ta-Cheng Lien
Hsin-Chang Lee
Anthony Yen
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