Old Web
English
Sign In
Acemap
>
authorDetail
>
Gary L. Crays
Gary L. Crays
Intel
Metrology
Secondary emission
Secondary electrons
High voltage
Transistor
1
Papers
3
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Prospects for using primary electron-based CD metrology
2004
Bryan J. Rice
Gary L. Crays
Alex Danilevsky
Michael Grumski
Shunsuke Koshihara
Tadashi Otaka
Jeanette M. Roberts
Show All
Source
Cite
Save
Citations (3)
1