Old Web
English
Sign In
Acemap
>
authorDetail
>
Frank L. Pasquale
Frank L. Pasquale
Lam Research
Atomic layer deposition
Analytical chemistry
Materials science
Oxide
Boron oxide
4
Papers
24
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Influence of O(3P)/O2 Flux on the Atomic Layer Deposition of B2O3 Using Trimethyl Borate at Room Temperature
2020
Journal of Physical Chemistry C
Aparna Pilli
Veronica Lee
Jessica Jones
Natasha Chugh
Jincheng Du
Frank L. Pasquale
Adrien Lavoie
Jeffry A. Kelber
Show All
Source
Cite
Save
Citations (0)
Atomic layer deposition of BN as a novel capping barrier for B2O3
2019
Journal of Vacuum Science and Technology
Aparna Pilli
Jessica Jones
Natasha Chugh
Jeffry A. Kelber
Frank L. Pasquale
Adrien Lavoie
Show All
Source
Cite
Save
Citations (6)
In situ XPS study of low temperature atomic layer deposition of B2O3 films on Si using BCl3 and H2O precursors
2018
Journal of Vacuum Science and Technology
Aparna Pilli
Jessica Jones
Veronica Lee
Natasha Chugh
Jeffry A. Kelber
Frank L. Pasquale
Adrien Lavoie
Show All
Source
Cite
Save
Citations (17)
Defect Characterization of ALD Grown SiO2 Films: A Systematic Approach
2013
Frank L. Pasquale
Shankar Swaminathan
Hu Kang
Adrien Lavoie
Show All
Source
Cite
Save
Citations (1)
1