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Xianglie Sun
Xianglie Sun
Chinese Academy of Sciences
Electrical resistivity and conductivity
Sheet resistance
Transmission electron microscopy
Precession electron diffraction
Deposition (law)
2
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1
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Thermal stability issue of ultrathin Ti-based silicide for its application in prospective DRAM peripheral 3D FinFET transistors
2021
Journal of Materials Science: Materials in Electronics
Yaodong Liu
Jing Xu
Jianfeng Gao
Jinbiao Liu
Dan Zhang
Xuebing Zhou
Xianglie Sun
Yongliang Li
Junfeng Li
Chao Zhao
Wenwu Wang
Dapeng Chen
Tianchun Ye
Jun Luo
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Influence of TaN films deposited using different N2 flow rates on the properties of Ta and Cu films in advanced 3D NAND memory
2020
Materials Science in Semiconductor Processing
Xianglie Sun
Shuliang Lv
Yuan Li
Chi Huang
Haodong Ma
Jun Luo
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