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M.B. Takeyama
M.B. Takeyama
Materials science
Composite material
grain orientation
Alloy
Interconnection
3
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Control of Cu(111) orientation on TaWN alloy barrier
2018
The Japan Society of Applied Physics
M.B. Takeyama
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The Effect of the HfN x Barrier Thickness on the Cu Grain Orientation Control
2016
Masaru Sato
E. Aoyagi
M.B. Takeyama
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Local Organizing Committee
2015
Young-Chang Joo
Sarah Eunkyung Kim
Jeong F. Kim
Hyungjun Kim
Nicky Kim
O. Nakatsuka
M.B. Takeyama
A. Tsukune
Taiyo Nippon
N. Hata
H. Sakurai
Takeshi Nogami
Manabu Tsujimura
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