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Chi-Hsein Huang
Chi-Hsein Huang
Tohoku University
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Plasma processing
Plasma
Engineering
Analytical chemistry
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Mechanism of mechanical deterioration in silicon microcantilever induced by plasma process
2010
SENSORS | IEEE Sensors
M. Tomura
Chi-Hsein Huang
Seiji Samukawa
Yusuke Yoshida
Takahito Ono
Satoshi Yamasaki
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