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Martin H. Dicks
Martin H. Dicks
Analytical chemistry
Silicon nitride
Sheet resistance
Van der Pauw method
Chalcogenide glass
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Sheet resistance measurement of non-standard cleanroom materials using suspended greek cross test structures
2006
ICMTS | International Conference on Microelectronic Test Structures
S. Enderling
Charles L. Brown
Stewart Smith
Martin H. Dicks
J. Tom M. Stevenson
Maria Mitkova
Michael N. Kozicki
Anthony J. Walton
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Sheet resistance measurement of non-standard cleanroom materials using suspended greek cross test structures
2006
ICMTS | International Conference on Microelectronic Test Structures
S. Enderling
Charles L. Brown
Stewart Smith
Martin H. Dicks
J. Tom M. Stevenson
Maria Mitkova
Michael N. Kozicki
A.J. Walton
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Characterisation of organometallic materials for IC processes
2004
Martin H. Dicks
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