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hitosi kou sou
hitosi kou sou
Plasma
Optics
Materials science
Z-pinch
X-ray lithography
3
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1
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Extreme ultraviolet light sources and soft x-ray laser based on discharge produced plasma
2015
eiki hotta
Eiki Hotta
osu suke sakai
Yusuke Sakai
Yasushi Hayashi
gouta niimi
G. Niimi
Bin Huang
キュシ ズ
Qiushi Zhu
hitosi kou sou
Inho Song
masahito watanabe
Masato Watanabe
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Study on Z-pinch plasma light source for EUV lithography
2005
hitosi kou sou
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26aB26P キヤピラリーZピンチ放電プラズマを用いた極端紫外光源の出力特性(プラズマ基礎・応用)
2003
mituo okamoto
hitosi kou sou
keita kitade
masahito watanabe
syou syun okino
kouiti yasuoka
kazuhiko horioka
eiki hotta
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