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S Stoebenau
S Stoebenau
Technische Universität Ilmenau
Deep reactive-ion etching
Electronic engineering
Materials science
Anodic bonding
Black silicon
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Black silicon—new functionalities in microsystems
2006
Journal of Micromechanics and Microengineering
Mike Stubenrauch
M. Fischer
Christoph Kremin
S Stoebenau
Arne Albrecht
O Nagel
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Citations (71)
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