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D.F. Hilscher
D.F. Hilscher
Manufacturing engineering
Engineering
Best practice
Recipe
surface cleaning
2
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1
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0
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Performance-optimized gate-first 22-nm SOI technology with embedded DRAM
2015
Ibm Journal of Research and Development
G. Freeman
Paul Chang
E. R. Engbrecht
Kenneth J. Giewont
D.F. Hilscher
M. Lagus
Timothy J. McArdle
B. Morgenfeld
Shreesh Narasimha
James P. Norum
Karen Nummy
Paul C. Parries
G. Wang
Jonathan K. Winslow
P. Agnello
Rajeev Malik
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Managing the negative impact of recipe diversity on wet process tools and capacity: a multi-fabricator model
1999
ASMC | Advanced Semiconductor Manufacturing Conference
N. Carpenter
D.F. Hilscher
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