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Diego Alvarado
Diego Alvarado
State University of New York System
Outgassing
Extreme ultraviolet
Photoresist
Resist
Surface finish
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Resist outgassing contamination on EUV multilayer mirror analogues
2014
Proceedings of SPIE
Diego Alvarado
Yudhishthir Kandel
Jaewoong Sohn
Tonmoy Chakraborty
Dominic Ashworth
Gregory Denbeaux
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