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Jianjun Jia
Jianjun Jia
ASML Holding
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Photoresist
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Resolution enhancement technologies
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EUV resolution enhancement techniques (RETs) for k1 0.4 and below
2015
Proceedings of SPIE
Stephen Hsu
Rafael Howell
Jianjun Jia
Hua-yu Liu
Keith Gronlund
Steve Hansen
Jörg Zimmermann
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Citations (18)
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