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Guido J. Stueber
Guido J. Stueber
Dielectric
Ellipsometry
Analytical chemistry
Ashing
Photoresist
1
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On the photoresist stripping and damage of ultralow k dielectric materials using remote H2- and D2-based discharges
2007
Journal of Vacuum Science & Technology B
Guido J. Stueber
G. S. Oehrlein
P. Lazzeri
M. Bersani
M. Anderle
Eric Busch
Richard McGowan
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