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Chrystelle Hamon
Chrystelle Hamon
Crystal growth
Dielectric
Spectroscopy
Sputtering
Plasma
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Plasma-induced defect generation on silicon surfaces in HDP-CVD processing
2000
PPID | International Symposium on Plasma Process-Induced Damage
Hichem MSaad
Sameer Desai
Derek R. Witty
Chrystelle Hamon
Seon-Mee Cho
Farhad Moghadam
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