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Yun Sang Kim
Yun Sang Kim
Lam Research
Optoelectronics
Doping
Semiconductor
Wafer
Nanoscopic scale
2
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2
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Conformal, Wafer-Scale and Controlled Nanoscale Doping of Semiconductors Via the iCVD Process
2018
Jae Hwan Kim
Hongkeun Park
Kwan Yong Pak
Alexander Yoon
Yun Sang Kim
Sung Gap Im
Wan Sik Hwang
Byung Jin Cho
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Conformal, Wafer-Scale and Controlled Nanoscale Doping of Semiconductors Via the iCVD Process
2018
IEDM | International Electron Devices Meeting
Jae Hwan Kim
Hong Keun Park
Kwan Yong Pak
Alexander Yoon
Yun Sang Kim
Sung Gap Im
Wan Sik Hwang
Byung Jin Cho
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Citations (2)
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