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Didier Thénot
Didier Thénot
Scanning electron microscope
Analytical chemistry
Anisotropy
Inductively coupled plasma
Wafer
3
Papers
37
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Broadband and Efficient Diffraction
2013
Advanced Optical Materials
Céline Ribot
Mane-Si Laure Lee
Stéphane Collin
Shailendra Bansropun
Patrick Plouhinec
Didier Thénot
Simone Cassette
Brigitte Loiseaux
Philippe Lalanne
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Citations (30)
Simulations of radical and ion fluxes on wafer in a Cl 2 /Ar ICP discharge : Confrontation with GaAs and GaN etch experiments
2010
Emilie Despiau-Pujo
Pascal Chabert
S. Bansropun
Didier Thénot
Patrick Plouhinec
Simone Cassette
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Simulations of radical and ion fluxes on a wafer in a Cl2/Ar inductively coupled plasma discharge: Confrontation with GaAs and GaN etch experiments
2010
Journal of Vacuum Science & Technology B
Emilie Despiau-Pujo
Pascal Chabert
S. Bansropun
Didier Thénot
Patrick Plouhinec
Simone Cassette
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Citations (7)
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