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Kim Suk-Goo
Kim Suk-Goo
Composite material
Oxide
Surface roughness
Materials science
Focused ion beam
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Characteristic Study for Defect of Top Si and Buried Oxide Layer on the Bonded SOI Wafer
2004
Korean Journal of Materials Research
Kim Suk-Goo
Paik Ungyu
Park Jea-Gun
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