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Yefim Kil
Yefim Kil
Coherent, Inc.
Laser
Lithography
Materials science
Optoelectronics
Analytical chemistry
2
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200-mW continuous-wave laser source at 198.5 nm for lithographic applications
2004
Andrea Caprara
Stuart Butterworth
Yefim Kil
Tracy Thonn
Keith Hubbard
Alan Macleod
Edward C. Rea
Colin Seaton
Luis A. Spinelli
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198-nm cw laser source for lithographic applications
2003
Edward C. Rea
Andrea Caprara
Colin Seaton
Yefim Kil
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