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Masato Odera
Masato Odera
Annealing (metallurgy)
Materials science
Outgassing
Curing (food preservation)
Analytical chemistry
2
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15
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Low temperature RTP for BCB curing
2007
Microelectronic Engineering
Michel Ouaknine
Igor J. Malik
Masato Odera
Toshikazu Ishigaki
Takeshi Ueda
Takashi Fukada
Woo Sik Yoo
Philippe Soussan
Philippe Muller
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Citations (15)
Titanium Silicide Formation: Process Characterization Using Single Wafer Rapid Thermal Furnace System
2006
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Dominique Garroux
Michel Ouaknine
Igor J. Malik
Takashi Fukada
Masato Odera
Toshikazu Ishigaki
Takeshi Ueda
Woo Sik Yoo
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