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A. Rezvanov
A. Rezvanov
Moscow Institute of Physics and Technology
Dielectric
Materials science
Inorganic chemistry
Porosity
Diethylenetriamine
3
Papers
12
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Effect of terminal methyl group concentration on critical properties and plasma resistance of organosilicate low-k dielectrics
2020
Journal of Vacuum Science and Technology
A. Rezvanov
Andrey V. Miakonkikh
D. S. Seregin
A. S. Vishnevskiy
K. A. Vorotilov
Konstantin V. Rudenko
Mikhail R. Baklanov
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Area selective grafting of siloxane molecules on low-k dielectric with respect to copper surface
2019
Applied Surface Science
A. Rezvanov
E Gornev
J.-F. de Marneffe
Silvia Armini
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Citations (6)
Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics
2019
Jean-Francois de Marneffe
Tatsuya Yamaguchi
Makoto Fujikawa
A. Rezvanov
R. Chanson
Jianran Zhang
Ziad El Otell
Khashayar Babaei Gavan
Syuji Nozawa
Yuki Kikuchi
Kaoru Maekawa
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Citations (1)
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