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Kenji Yasumura
Kenji Yasumura
Optoelectronics
Trench
Materials science
Analytical chemistry
Subthreshold conduction
5
Papers
10
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Excellent Electrical Characteristics of Ultrafine Trench Isolation
1998
Journal of The Electrochemical Society
K. Shiozawa
T. Oishi
H. Maeda
Takaaki Murakami
Kenji Yasumura
Yuji Abe
Yasunori Tokuda
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Citations (6)
Feldeffekttransistor und Herstellungsverfahren desselben
1997
Kenji Yasumura
Takaaki Murakami
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Electrical Characteristics of Ultra-Fine Trench Isolation Fabricated by a New Two-Step Filling Process
1996
Japanese Journal of Applied Physics
Katsuomi Shiozawa
Toshiyuki Oishi
Hiroshi Maeda
Takaaki Murakami
Kenji Yasumura
Yuji Abe
Yasunori Tokuda
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Citations (3)
Electrical Characteristics of Ultra-Fine Trench Isolation Fabricated by a New Two-Step Filling Process
1996
The Japan Society of Applied Physics
Katsuomi Shiozawa
Toshiyuki Oishi
H. Maeda
Takaaki Murakami
Kenji Yasumura
Y. Abe
Yasunori Tokuda
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Citations (1)
A semiconductor device with a Elementisolationsoxidfilm having a flat surface, and methods for producing such a semiconductor device
1996
Kaoru Motonami
Shigeru Shiratake
Hiroshi Matsuo
Yuichi Yokoyama
Kenji Morisawa
Ritsuko Gotoda
Takaaki Murakami
Satoshi Hamamoto
Kenji Yasumura
Yasuyoshi Itoh
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