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Yasuhiro Sugimoto
Yasuhiro Sugimoto
Doping
Physics
Analytical chemistry
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Dopant
3
Papers
12
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Mechanisms for dose retention in conformal arsenic doping using a radial line slot antenna microwave plasma source
2015
Journal of Applied Physics
Hirokazu Ueda
Peter L. G. Ventzek
Masahiro Oka
Yuuki Kobayashi
Yasuhiro Sugimoto
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Citations (2)
Conformal doping of topographic silicon structures using a radial line slot antenna plasma source
2014
Journal of Applied Physics
Hirokazu Ueda
Peter L. G. Ventzek
Masahiro Oka
Masahiro Horigome
Yuuki Kobayashi
Yasuhiro Sugimoto
Toshihisa Nozawa
Satoru Kawakami
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Formation, nature, and stability of the arsenic-silicon-oxygen alloy for plasma doping of non-planar silicon structures
2014
Applied Physics Letters
Peter L. G. Ventzek
Kyoung E. Kweon
Hirokazu Ueda
Masahiro Oka
Yasuhiro Sugimoto
Gyeong S. Hwang
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Citations (3)
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