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Jianghua Leng
Jianghua Leng
Computer science
Process integration
Materials science
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Control engineering
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Critical defect detection, monitoring and fix through process integration engineering by using D2DB pattern monitor solution
2019
Ming Tian
Yu Zhang
Tiapeng Guan
Jianghua Leng
BaoJun Zhao
Lei Yan
Wei Hua
Abhishek Vikram
Guojie Chen
Hui Wang
Gary Zhang
Wenkui Liao
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Patterning Defect Study for Process Integration Engineering Using Pattern Fidelity Monitoring with Review SEM Images
2019
Yu Zhang
Abhishek Vikram
Ming Tian
Tianpeng Guan
Jianghua Leng
Baojun Zhao
Lei Yan
Wei Hu
Guojie Chen
Hui Wang
Gary Zhang
Wenkui Liao
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The study of 28nm BEOL Cu gap-fill process
2017
CSTIC | China Semiconductor Technology International Conference
Yu Bao
Gang Shi
Lin Gao
Yanyan Zhang
Yingming Liu
Peng Tian
Fuchun Xi
Wei Hu
Ying Gao
Zhenhua Cai
BaoJun Zhao
Zhigang Yang
Jianghua Leng
Haifeng Zhou
Jingxun Fang
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The Application of AGILE for 40nm Via Hole Development of Lithography Process and Solutions
2014
Xianguo Dong
Zhibiao Miao
Wuping Wang
Zhengkai Yang
Biqiu Liu
Long Zhao
Jianghua Leng
Yu Zhang
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Optimization of M1 to Contact Connection in Sub-40nm Node
2013
Liang Zhang
Jingxun Fang
Zhibiao Mao
Hai Huang
Fang Li
Junhua Yan
Shirui Yu
Jun Huang
Long Zhao
Huijun Zhang
Fei Chen
Jianghua Leng
Yefang Zhu
Xubin Jing
Liujiang Yu
Yu Zhang
Yongfeng Cao
Albert Pang
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