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Ashish Pandya
Ashish Pandya
Resist
Materials science
Acrylate
Photolithography
Alkoxy group
2
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3
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Polyvinyiphenol DIN Resist Systems
2017
Uday Kumar
Ashish Pandya
Roger F. Sinta
Wu-Song Huang
Rao Bantu
Ahmad D. Katnani
Ibm Microelectronics
Hopewell Junction
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Probing the environmental stability and bake latitudes of acetal vs. ketal protected polyvinylphenol DUV resist systems
1997
Uday Kumar
Ashish Pandya
Roger F. Sinta
Wu-Song Huang
Rao Bantu
Ahmad D. Katnani
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Citations (3)
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