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C Herweg
C Herweg
Bosch
Analytical chemistry
Thin film
Compressible flow
Supersonic speed
Plasma
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Thin film growth from a low pressure plasma excited in a supersonic expanding gas jet
2009
Journal of Physics D
C. Wachtendorf
C Herweg
M Daeuber
Jan Benedikt
A. von Keudell
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Citations (5)
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