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Shoufeng Lin
Shoufeng Lin
Zhejiang University
Line (geometry)
Electronic engineering
Etching
Materials science
Isotropic etching
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Sacrificial layer etching process in joint channels
2006
Journal of Micromechanics and Microengineering
Changju Wu
Zhonghe Jin
Huilian Ma
Shoufeng Lin
Yuelin Wang
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