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Yuta Tokumoto
Yuta Tokumoto
Kyushu University
Composite material
high pressure
Materials science
Clogging
Polishing
4
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A-04 Quantitative evaluation of cleaning effect by the high-pressure jet in CMP hard pad : For jet pressure and standoff distance
2016
Masashi Kitamura
Yuta Tokumoto
Syuhei Kurokawa
Terutake Hayashi
Hirokuni Hiyama
Yutaka Wada
Chikako Takato
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A-03 The cleaning effect of High Pressure Jet to the Soft type CMP pad : The cleaning effect to residual silica regarding rotational speed and atomizing pressure
2016
Yuta Tokumoto
Masashi Kitamura
Syuhei Kurokawa
Terutake Hayashi
Hirokuni Hiyama
Yutaka Wada
Chikako Takato
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815 High pressure jet conditioning effect of the soft polishing pad surface
2015
Yuta Tokumoto
Syuhei Kurokawa
Terutake Hayashi
Masashi Kitamura
Hirokuni Hiyama
Yutaka Wada
Chikako Takato
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Proposal of cleanliness evaluation method of CMP pad, and investigation of cleaning effect by the high-pressure jet
2015
Masashi Kitamura
Syuhei Kurokawa
Yuta Tokumoto
Terutake Hayashi
Hirokuni Hiyama
Yutaka Wada
Chikako Takatoh
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