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Juan J. Faria-Briceno

University of New Mexico

5

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High-speed in-line optical angular scatterometer for high-throughput roll-to-roll nanofabrication

2021
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Nanoscale limits of angular optical scatterometry

2020 AIP Advances
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Nanoscale details of liquid drops on 1D patterned surfaces revealed by etching

2019 Journal of Vacuum Science & Technology B
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Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication

2019 Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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Measuring Liquid Drop Properties on Nanoscale 1D Patterned Photoresist Structures

2019 Scientific Reports
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Citations (5)