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Joseph Zekry
Joseph Zekry
ASML Holding
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Extreme ultraviolet lithography
Optics
Computer science
Aerial image
3
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12
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0
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Experimental verification of high-NA imaging simulations using SHARP
2020
Fei Liu
Natalia Davydova
Markus P. Benk
Eelco van Setten
Gerardo Bottiglieri
John McNamara
Vincent Wiaux
Joern-Holger Franke
Kenneth A. Goldberg
Dong-Seok Nam
Joseph Zekry
Patrick P. Naulleau
Timon Fliervoet
Rene Carpaij
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Fundamental understanding and experimental verification of bright versus dark field imaging
2020
Natalia Davydova
Jo Finders
Joern-Holger Franke
Andreas Frommhold
Renzo Capelli
Grizelda Kersteen
Andreas Verch
John McNamara
Claire van Lare
Eelco van Setten
Joseph Zekry
Timon Fliervoet
Rene Carpaij
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High NA EUV lithography: Next step in EUV imaging
2019
Eelco van Setten
Gerardo Bottiglieri
John McNamara
Jan van Schoot
Kars Zeger Troost
Joseph Zekry
Timon Fliervoet
Stephen Hsu
Joerg Zimmermann
Matthias Roesch
Bartosz Bilski
Paul Graeupner
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Citations (12)
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