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Maaike Op de Beeck
Maaike Op de Beeck
Mitsubishi Electric
Materials science
Lithography
Phase (waves)
Electronic engineering
Phase-shift mask
3
Papers
7
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2024
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Topographical masks : a new approach to increase the DOF on topographical substrates
1993
Microelectronic Engineering
Maaike Op de Beeck
Akiko Hisasue
Akira Tokui
Hal Kusunose
Kazuya Kamon
Hiroaki Morimoto
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Novel process for phase-shifting mask fabrication
1992
Haruhiko Kusunose
Satoshi Aoyama
Kunihiro Hosono
Susumu Takeuchi
Shuichi Matsuda
Maaike Op de Beeck
Nobuyuki Yoshioka
Yaichiro Watakabe
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IMPROVEMENT OF FOCUS AND EXPOSURE LATITUDE BY THE USE OF PHASE-SHIFTING MASKS FOR DUV APPLICATIONS
1991
Maaike Op de Beeck
Akira Tokui
Masato Fujinaga
Nobuyuki Yoshioka
Kazuya Kamon
Tetsuro Hanawa
Katsuhiro Tsukamoto
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Citations (4)
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