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Atul Kumar
Atul Kumar
Capacitor
Pulsed DC
Sputter deposition
Dielectric
Thin film
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Composite and multilayered TaO/sub x/-TiO/sub y/ high dielectric constant thin films
1998
IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B
M.C. Nielsen
Jin-Young Kim
Eugene J. Rymaszewski
Toh-Ming Lu
Atul Kumar
H. Bakhru
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Citations (12)
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